JPH0222647Y2 - - Google Patents

Info

Publication number
JPH0222647Y2
JPH0222647Y2 JP6860685U JP6860685U JPH0222647Y2 JP H0222647 Y2 JPH0222647 Y2 JP H0222647Y2 JP 6860685 U JP6860685 U JP 6860685U JP 6860685 U JP6860685 U JP 6860685U JP H0222647 Y2 JPH0222647 Y2 JP H0222647Y2
Authority
JP
Japan
Prior art keywords
laminar flow
recess
flow element
lid
differential pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6860685U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61184921U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6860685U priority Critical patent/JPH0222647Y2/ja
Publication of JPS61184921U publication Critical patent/JPS61184921U/ja
Application granted granted Critical
Publication of JPH0222647Y2 publication Critical patent/JPH0222647Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
JP6860685U 1985-05-09 1985-05-09 Expired JPH0222647Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6860685U JPH0222647Y2 (en]) 1985-05-09 1985-05-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6860685U JPH0222647Y2 (en]) 1985-05-09 1985-05-09

Publications (2)

Publication Number Publication Date
JPS61184921U JPS61184921U (en]) 1986-11-18
JPH0222647Y2 true JPH0222647Y2 (en]) 1990-06-19

Family

ID=30603503

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6860685U Expired JPH0222647Y2 (en]) 1985-05-09 1985-05-09

Country Status (1)

Country Link
JP (1) JPH0222647Y2 (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003329503A (ja) * 2003-05-19 2003-11-19 Ckd Corp 熱式流量計
WO2011040409A1 (ja) * 2009-10-01 2011-04-07 株式会社堀場エステック 流量測定機構及びマスフローコントローラ

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07119636B2 (ja) * 1987-08-26 1995-12-20 株式会社日立製作所 流量計
JP6819863B2 (ja) * 2016-04-07 2021-01-27 日立金属株式会社 バイパスユニット、流量計用ベース、流量制御装置用ベース、流量計、及び流量制御装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003329503A (ja) * 2003-05-19 2003-11-19 Ckd Corp 熱式流量計
WO2011040409A1 (ja) * 2009-10-01 2011-04-07 株式会社堀場エステック 流量測定機構及びマスフローコントローラ
JP5808537B2 (ja) * 2009-10-01 2015-11-10 株式会社堀場エステック 流量測定機構及びマスフローコントローラ
JP2016035462A (ja) * 2009-10-01 2016-03-17 株式会社堀場エステック 測定機構

Also Published As

Publication number Publication date
JPS61184921U (en]) 1986-11-18

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